Influence of oxygen pressure on the fs laser-induced oxidation of molybdenum thin films

We present a study of femtosecond (1028 nm, 230 fs, 54.7 MHz) laser processing on molybdenum (Mo) thin films. Irradiations were done under ambient air as well as pure oxygen (O-2) at various gauge pressures (4, 8, 12 and 16 psi). Our results indicate that the high heating rates associated with laser processing allow the production of different molybdenum oxides. Raman spectroscopy and scanning electron microscopy are used to characterize the molybdenum oxidation for the different irradiation and oxygen pressures parameters chosen showing a high correlation between well-defined oxidation zones and the oxygen pressure surrounding the samples during the irradiation of the Mo thin films. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement