Effects of bias voltage on the microstructure and properties of Al-doped hydrogenated amorphous carbon films synthesized by a hybrid deposition technique

Published 2018 View Full Article

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Title
Effects of bias voltage on the microstructure and properties of Al-doped hydrogenated amorphous carbon films synthesized by a hybrid deposition technique
Authors
Keywords
-
Journal
VACUUM
Volume 154, Issue -, Pages 159-166
Publisher
Elsevier BV
Online
2018-05-10
DOI
10.1016/j.vacuum.2018.05.008

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