Impacts of substrate bias and dilution gas on the properties of Si-incorporated diamond-like carbon films by plasma deposition using organosilane as a Si source

Title
Impacts of substrate bias and dilution gas on the properties of Si-incorporated diamond-like carbon films by plasma deposition using organosilane as a Si source
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 654, Issue -, Pages 38-48
Publisher
Elsevier BV
Online
2018-03-28
DOI
10.1016/j.tsf.2018.03.075

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