Effects of substrate temperature and deposition rate on the phase separated morphology of co-sputtered, Cu-Mo thin films

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Title
Effects of substrate temperature and deposition rate on the phase separated morphology of co-sputtered, Cu-Mo thin films
Authors
Keywords
-
Journal
THIN SOLID FILMS
Volume 647, Issue -, Pages 50-56
Publisher
Elsevier BV
Online
2017-12-16
DOI
10.1016/j.tsf.2017.12.013

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