Copper nitride layers synthesized by pulsed magnetron sputtering

Title
Copper nitride layers synthesized by pulsed magnetron sputtering
Authors
Keywords
Pulsed magnetron sputtering, Gating frequency, Copper nitride layers, OES
Journal
THIN SOLID FILMS
Volume 645, Issue -, Pages 32-37
Publisher
Elsevier BV
Online
2017-10-20
DOI
10.1016/j.tsf.2017.10.042

Ask authors/readers for more resources

Reprint

Contact the author

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Add your recorded webinar

Do you already have a recorded webinar? Grow your audience and get more views by easily listing your recording on Peeref.

Upload Now