4.6 Article

Nano-confinement of block copolymers in high accuracy topographical guiding patterns: modelling the emergence of defectivity due to incommensurability

Journal

SOFT MATTER
Volume 14, Issue 33, Pages -

Publisher

ROYAL SOC CHEMISTRY
DOI: 10.1039/c8sm01045e

Keywords

-

Funding

  1. EU project NFFA (Nanoscience Foundries and Fine Analysis) [654360]
  2. MINECO [TEC2015-69864-R]

Ask authors/readers for more resources

Extreme ultraviolet interference lithography (EUV-IL) is used to manufacture topographical guiding patterns to direct the self-assembly of block copolymers. High-accuracy silicon oxide-like patterns with trenches ranging from 68 nm to 117 nm width are fabricated by exposing a hydrogen silsesquioxane (HSQ) resist layer using EUV-IL. We investigate how the accuracy, the low line width roughness and the low line edge roughness of the resulting patterns allow achieving DSA line/space patterns of a PS-b-PMMA (polystyrene-block-poly methyl methacrylate) block copolymer of 11 nm half-pitch with low defectivity. We conduct an in-depth study of the dependence of the DSA pattern morphology on the trench width and on how the neutral brush covers the guiding pattern. We identify the relation between trench width and the emergence of defects with nanometer precision. Based on these studies, we develop a model that extends available free energy models, which allows us to predict the patterning process window.

Authors

I am an author on this paper
Click your name to claim this paper and add it to your profile.

Reviews

Primary Rating

4.6
Not enough ratings

Secondary Ratings

Novelty
-
Significance
-
Scientific rigor
-
Rate this paper

Recommended

Article Nanoscience & Nanotechnology

High-efficiency diffraction gratings for EUV and soft x-rays using spin-on-carbon underlayers

Xiaolong Wang, Dimitrios Kazazis, Li-Ting Tseng, Alex P. G. Robinson, Yasin Ekinci

Summary: This study reports on the fabrication and characterization of high-resolution gratings using spin-on-carbon underlayers. The results demonstrate that the bilayer gratings made of hydrogen silsesquioxane and spin-on-carbon exhibit excellent performance as a grating mask for extreme ultraviolet interference lithography. The diffraction efficiency of the gratings can be accurately measured by measuring the relative ratio of the dose-to-clear curves of the photoresist. The experimental results confirm the theoretical predictions and demonstrate the successful fabrication of line/space patterns using EUV-IL.

NANOTECHNOLOGY (2022)

Article Nanoscience & Nanotechnology

Poly(methyl methacrylate)-Based Nanofluidic Device for Rapid and Multiplexed Serological Antibody Detection of SARS-CoV-2

Thomas Mortelmans, Dimitrios Kazazis, Celestino Padeste, Philipp Berger, Xiaodan Li, Yasin Ekinci

Summary: The development of a three-dimensional nanofluidic device for rapid and multiplexed detection of viral antibodies is presented. The device is made from poly(methyl methacrylate) and utilizes nanoscale topography variations for particle immobilization and trapping. It can be used for specific and sensitive multiplexed detection of serological antibodies against different viral proteins. The device's applications can be extended to detect various diseases simultaneously.

ACS APPLIED NANO MATERIALS (2022)

Article Chemistry, Multidisciplinary

Charge Configuration Memory Devices: Energy Efficiency and Switching Speed

Anze Mraz, Rok Venturini, Damjan Svetin, Vitomir Sever, Ian Aleksander Mihailovic, Igor Vaskivskyi, Bojan Ambrozic, Goran Drazic, Maria D'Antuono, Daniela Stornaiuolo, Francesco Tafuri, Dimitrios Kazazis, Jan Ravnik, Yasin Ekinci, Dragan Mihailovic

Summary: Current trends in data processing have led to a search for new concepts of memory devices that prioritize efficiency, speed, and scalability. A promising new approach based on resistance switching in 1T-TaS2 has been investigated. The research explores the energy efficiency scaling of charge configuration memory (CCM) devices in relation to device size, data write time (tau(W)), and other parameters. The study finds that energy efficiency scales linearly with device size and data write time, only deviating from linearity when tau(W) approaches the intrinsic switching limit. CCM devices are shown to be faster and more energy efficient compared to current memory devices, utilizing 2.2 fJ, 16 ps electrical pulses for two-terminal switching.

NANO LETTERS (2022)

Article Chemistry, Multidisciplinary

Molecular Glass Resists Based on Tetraphenylsilane Derivatives: Effect of Protecting Ratios on Advanced Lithography

Yake Wang, Jinping Chen, Yi Zeng, Tianjun Yu, Xudong Guo, Shuangqing Wang, Timothee Allenet, Michaela Vockenhuber, Yasin Ekinci, Jun Zhao, Shumin Yang, Yanqing Wu, Guoqiang Yang, Yi Li

Summary: This study synthesized a series of t-Boc protected tetraphenylsilane derivatives and investigated their application in lithography. The results showed that different t-Boc protecting ratios affect the contrast and pattern blur, with TPSi-Boc70% demonstrating the best patterning capability.

ACS OMEGA (2022)

Article Nanoscience & Nanotechnology

Sulfonium-Functionalized Polystyrene-Based Nonchemically Amplified Resists Enabling Sub-13 nm Nanolithography

Zhihao Wang, Jinping Chen, Tianjun Yu, Yi Zeng, Xudong Guo, Shuangqing Wang, Timothee Allenet, Michaela Vockenhuber, Yasin Ekinci, Guoqiang Yang, Yi Li

Summary: Nonchemically amplified resists based on polystyrene modified with triphenyl sulfonium triflate groups were prepared. The level of sulfonium groups could be controlled by changing the feed ratio of raw materials, resulting in two different resists with sulfonium ratios of 50% and 70%. The PSTS0.7 resist exhibited a better resolution (18 nm half-pitch) compared to the PSTS0.5 resist (20 nm half-pitch) under the same developing conditions for electron beam lithography.

ACS APPLIED MATERIALS & INTERFACES (2023)

Article Chemistry, Multidisciplinary

The Extent of Platinum-Induced Hydrogen Spillover on Cerium Dioxide

Arik Beck, Dimitrios Kazazis, Yasin Ekinci, Xiansheng Li, Elisabeth Agnes Mueller Gubler, Armin Kleibert, Marc-Georg Willinger, Luca Artiglia, Jeroen A. van Bokhoven

Summary: Hydrogen spillover from metal nanoparticles to oxides is an important process in hydrogenation catalysis and hydrogen storage. In this study, advanced sample fabrication and in situ X-ray photoelectron spectroscopy were used to investigate the local and far-reaching effects of hydrogen spillover in a platinum-ceria catalyst. The results showed that at low temperatures, hydrogen spillover led to the formation of surface O-H on the whole ceria surface, extending microns away from the platinum. These findings demonstrate the impact of hydrogen on the entire catalyst surface and its involvement in catalysis and restructuring.

ACS NANO (2022)

Article Nanoscience & Nanotechnology

Injection Molding of Thermoplastics for Low-Cost Nanofluidic Devices

Thomas Mortelmans, Dimitrios Kazazis, Jerome Werder, Per Magnus Kristiansen, Yasin Ekinci

Summary: Thermoplastic micro- and nanofluidics have gained popularity as an alternative to PDMS-based devices due to their favorable chemical and physical properties. This article presents a fabrication route using grayscale e-beam lithography and injection molding to create capillary 3D thermoplastic nanofluidic devices with unprecedented accuracy in the sub-micrometer range. The fabrication process involves patterned resist, electroforming, and injection molding, resulting in devices with maintained height profile and reduced roughness.

ACS APPLIED NANO MATERIALS (2022)

Article Chemistry, Multidisciplinary

Charge Shielding-Oriented Design of Zinc-Based Nanoparticle Liquids for Controlled Nanofabrication

Peipei Tao, Qianqian Wang, Michaela Vockenhuber, Da Zhu, Tianqi Liu, Xiaolin Wang, Ziyu Hu, Yimeng Wang, Jianlong Wang, Yaping Tang, Yasin Ekinci, Hong Xu, Xiangming He

Summary: This study presents the realization of zinc-based nanoparticle liquids and their potential for controlled nanofabrication. By utilizing the metal-core charge shielding strategy, nanoparticles with liquefaction characteristics and excellent film-forming capabilities were prepared. These nanoparticles also demonstrated controlled top-down nanofabrication.

JOURNAL OF THE AMERICAN CHEMICAL SOCIETY (2023)

Article Materials Science, Multidisciplinary

Suppressing of secondary electron diffusion for high-precision nanofabrication

Qianqian Wang, Yuting Zhou, Xiaolin Wang, Hongqiang Gao, Zhiwen Shu, Ziyu Hu, Peipei Tao, Yasin Ekinci, Michaela Vockenhuber, Yiqin Chen, Huigao Duan, Hong Xu, Xiangming He

Summary: High-resolution patterning has been achieved by suppressing residues caused by secondary electron diffusion using a free radical quencher in a highly sensitive zirconium-containing photoresist. This novel approach effectively improves resolution and edge roughness, as well as enhances patterning contrast.

MATERIALS TODAY (2023)

Article Nanoscience & Nanotechnology

Nonchemically Amplified Molecular Resists Based on Sulfonium-Functionalized Sulfone Derivatives for Sub-13 nm Nanolithography

Yake Wang, Jinping Chen, Yi Zeng, Tianjun Yu, Shuangqing Wang, Xudong Guo, Rui Hu, Peng Tian, Michaela Vockenhuber, Dimitrios Kazazis, Yasin Ekinci, Yanqing Wu, Shumin Yang, Jun Zhao, Guoqiang Yang, Yi Li

Summary: In this study, a series of molecular resists based on a bis(4-butoxyphenyl) sulfone core attached to a varying number of radiation-sensitive triphenylsulfonium units were designed and synthesized. These resists showed high resolution and low line edge roughness in both e-beam and EUV lithography. The exposure mechanisms and outgassing behavior of the resists were investigated, and they exhibited high etch resistance and accurate pattern transfer capabilities. The results highlight the potential of these resists for practical applications in high-resolution lithography.

ACS APPLIED NANO MATERIALS (2023)

Proceedings Paper Engineering, Manufacturing

Reflective grazing incidence EUV nanoscope for wafer metrology

Tao Shen, Yasin Ekinci, Iacopo Mochi

Summary: EUV lithography is a technology used in semiconductor manufacturing to achieve further size reduction. Non-destructive metrology at the nanoscale for different structures and materials is a challenging task. REGINE is a new synchrotron end-station developed to explore non-destructive EUV metrology for surface/layered structures. It aims to enable coherent diffraction imaging, scatterometry, and reflectometry in the energy range of 80 to 200 eV. This work presents the concept of REGINE and the results of commissioning experiments.

INTERNATIONAL CONFERENCE ON EXTREME ULTRAVIOLET LITHOGRAPHY 2022 (2022)

Article Engineering, Electrical & Electronic

Sensitivity enhancement of a high-resolution negative-tone nonchemically amplified metal organic photoresist for extreme ultraviolet lithography

Scott M. Lewis, Hayden R. Alty, Michaela Vockenhuber, Guy A. DeRose, Antonio Fernandez-Mato, Dimitrios Kazazis, Paul L. Winpenny, Richard Grindell, Grigore A. Timco, Axel Scherer, Yasin Ekinci, Richard E. P. Winpenny

Summary: A new class of negative-tone resist materials based on heterometallic rings has been developed and the sensitivity of the resist has been improved by incorporating HgCl2 and HgI2 into the molecular design.

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 (2022)

Article Engineering, Electrical & Electronic

Photon flux dependent image resolution of reflective ptychographic microscope for extreme ultraviolet actinic mask metrology

Hyun-Su Kim, Ricarda Nebling, Atoosa Dejkameh, Tao Shen, Yasin Ekinci, Iacopo Mochi

Summary: In this study, we investigated the relationship between photon flux, image resolution, and illumination intensity in diffraction imaging for EUV mask inspection. Our findings provide insights for optimizing CDI for EUV imaging and increasing the throughput of EUV mask inspection with low power sources.

JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3 (2022)

Proceedings Paper Engineering, Industrial

EUV mask defect material characterization through actinic lensless imaging

Tao Shen, Dimitrios Kazazis, Hyun-Su Kim, Atoosa Dejkameh, Ricarda Nebling, Yasin Ekinci, Iacopo Mochi

Summary: The RESCAN platform, based on coherent diffraction imaging (CDI), has been used for EUV mask inspection and review. It has shown the ability to detect both phase and amplitude defects on masks. This study explores the possibility of using RESCAN to distinguish surface defects of different materials and proposes a feasible method.

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVI (2022)

Article Chemistry, Physical

Fluorine-Rich Zinc Oxoclusters as Extreme Ultraviolet Photoresists: Chemical Reactions and Lithography Performance

Neha Thakur, Michaela Vockenhuber, Yasin Ekinci, Benjamin Watts, Angelo Giglia, Nicola Mahne, Stefano Nannarone, Sonia Castellanos, Albert M. Brouwer

Summary: In this study, the EUV absorption of methacrylic acid ligands of Zn oxoclusters was enhanced by introducing fluorine atoms, leading to improved sensitivity of the photoresist. Extensive spectroscopic and microscopic studies provided insights into the underlying mechanism, laying the groundwork for the development of EUV materials with better performance.

ACS MATERIALS AU (2022)

Article Chemistry, Physical

Synthesis of dimpled polymer-silica nanocomposite particles by interfacial swelling-based seeded polymerization

Yiping Yin, Zhe Wang, Hua Zou

Summary: This study presents a novel method for preparing dimpled polymer-silica nanocomposite particles using interfacial swelling-based seeded polymerization. The optimized conditions allow for a relatively high percentage of dimpled particles to be achieved.

SOFT MATTER (2024)

Article Chemistry, Physical

Tough polycyclooctene nanoporous membranes from etchable block copolymers

Brenden D. Hoehn, Elizabeth A. Kellstedt, Marc A. Hillmyer

Summary: Porous materials with nanometer-scale pores have important applications as nanoporous membranes. In this study, ABA triblock copolymers were used as precursors to produce nanoporous polymeric membranes (NPMs) in thin film form by degrading the end blocks. Polycyclooctene (PCOE) NPMs with tunable pore sizes were successfully prepared using solvent casting technique. Oxygen plasma etching was employed to improve the surface porosity and hydrophilicity of the membranes. This study provides a straightforward method to produce tough NPMs with high porosity and hydrophilic surface properties.

SOFT MATTER (2024)

Article Chemistry, Physical

Linear and ring polypeptides complexed with oppositely charged surfactants: the cohesion of the complexes as revealed in atomistic simulations

Vladislav S. Petrovskii, Stepan I. Zholudev, Igor I. Potemkin

Summary: This article investigates the behavior of linear and ring polypeptide chains in aqueous solution and explores the properties of the complexes formed by these chains with oppositely charged surfactants. The results demonstrate that the complexes of linear supercharged unfolded polypeptides and the corresponding surfactants exhibit impressive adhesive properties.

SOFT MATTER (2024)

Article Chemistry, Physical

Development of tissue-engineered vascular grafts from decellularized parsley stems

Merve Cevik, Serkan Dikici

Summary: Cardiovascular diseases are a leading cause of death globally, and vascular grafts are a promising treatment option. This study focuses on tissue-engineered vascular grafts (TEVGs) using decellularized parsley stems as a potential biomaterial. The decellularized parsley stems showed suitable properties for TEVGs, providing a suitable environment for human endothelial cells to form a pseudo endothelium. This study showcases the potential of using parsley stems for TEVGs.

SOFT MATTER (2024)

Article Chemistry, Physical

Control of liquid crystals combining surface acoustic waves, nematic flows, and microfluidic confinement

Gustavo A. Vasquez-Montoya, Tadej Emersic, Noe Atzin, Antonio Tavera-Vazquez, Ali Mozaffari, Rui Zhang, Orlando Guzman, Alexey Snezhko, Paul F. Nealey, Juan J. de Pablo

Summary: The optical properties of liquid crystals are typically controlled by electric fields. In this study, we investigate the effects of microfluidic flows and acoustic fields on the molecular orientation and optical response of nematic liquid crystals. We identify several previously unknown structures and explain them through calculations and simulations. These findings hold promise for the development of new systems combining sound, flow, and confinement.

SOFT MATTER (2024)

Article Chemistry, Physical

Shape memory hydrogels with remodelable permanent shapes and programmable cold-induced shape recovery behavior

Xinjun Wu, Xin Guan, Shushu Chen, Jiangpeng Jia, Chongyi Chen, Jiawei Zhang, Chuanzhuang Zhao

Summary: This research presents a novel shape memory hydrogel with a remodelable permanent shape and programmable cold-induced shape recovery behavior. The hydrogel is prepared using specific treatment methods to achieve shape fixation by heating and shape recovery by cooling. Additionally, deformable devices can be obtained by assembling hydrogel blocks with different concentrations.

SOFT MATTER (2024)

Article Chemistry, Physical

1H-NMR studies on the volume phase transition of DNA-modified pNipmam microgels

Rebecca Hengsbach, Gerhard Fink, Ulrich Simon

Summary: This study examines the properties of DNA functionalized pNipmam microgels and pure pNipmam microgels at different concentrations of sodium chloride and in PBS solutions using temperature dependent H-1-NMR measurements. The results show that DNA modification affects the volume phase transition temperature and the addition of salt and PBS further enhances this effect.

SOFT MATTER (2024)

Article Chemistry, Physical

Self-assembly of colloids with competing interactions confined in spheres

Ningyi Li, Junhong Li, Lijingting Qing, Shicheng Ma, Yao Li, Baohui Li

Summary: This paper investigates the self-assembly behavior of colloids with competing interactions under spherical confinement and finds that different ordered structures can be formed under different sized spherical confinements. Moreover, more perforated structures are formed in smaller spheres.

SOFT MATTER (2024)