Fabrication of ZnO nanorods and Chitosan@ZnO nanorods on MEMS piezoresistive self-actuating silicon microcantilever for humidity sensing

Published 2018 View Full Article

Authors

Keywords

Microelectromechanical systems, Humidity sensing, Silicon microcantilever, Self-actuating, DC sputtering/annealing, Zinc oxide nanorods, Chitosan self-assembled monolayers

Journal

SENSORS AND ACTUATORS B-CHEMICAL

Volume 273, Issue -, Pages 276-287

Publisher

Elsevier BV

Online

2018-06-15

DOI

10.1016/j.snb.2018.06.017

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