Pulsed DC magnetron sputtered titanium nitride thin films for localized heating applications in MEMS devices

Published 2018 View Full Article

  1. Home
  2. Publications
  3. Publication Search
  4. Publication Details
Title
Pulsed DC magnetron sputtered titanium nitride thin films for localized heating applications in MEMS devices
Authors
Keywords
Thin films, Pulsed dc magnetron sputtering, Titanium nitride, Resistivity, Microheater
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 272, Issue -, Pages 199-205
Publisher
Elsevier BV
Online
2018-01-11
DOI
10.1016/j.sna.2017.12.066

Ask authors/readers for more resources

Protocol

Community support

Reagent

Community support

Reprint

Contact the author

Discover Peeref hubs

Discuss science. Find collaborators. Network.

Join a conversation

Find the ideal target journal for your manuscript

Explore over 38,000 international journals covering a vast array of academic fields.

Search
Webinars Posters Questions Hubs Funding Journals Articles Connect Collections Reviewers About Us FAQs Mobile App Privacy Policy Terms of Use
© Peeref 2019-2024. All rights reserved.