Journal
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
Volume 21, Issue 4, Pages -Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSTQE.2014.2385957
Keywords
Microelectromechanical systems; microfabrication; nanophotonics; optical metamaterials; plasmons
Categories
Funding
- MEXT KAKENHI [25109702]
- Grants-in-Aid for Scientific Research [25109702, 13J02945] Funding Source: KAKEN
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Metamaterials have attracted a great deal of attention as artificial electromagnetic materials having unique optical characteristics, and various innovative optical applications have been expected. Micro electromechanical systems (MEMS)-based reconfigurable metamaterials are candidate technologies for active optical control. In this paper, we focus on MEMS-based reconfigurable metamaterials operated in the optical region between visible and near-infrared wavelengths. A brief overview of static optical metamaterials and active optical metamaterials driven by MEMS actuators is presented. Moreover, points to be considered for a micromachining process of optical metamaterials are discussed with results of calculations.
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