4.7 Article

Fabrication Process Yielding Saturated Nanowire Single-Photon Detectors With 24-ps Jitter

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSTQE.2014.2372054

Keywords

Single-photon detectors; infrared photon detectors; SNSPDs; SSPDs; niobium nitride

Funding

  1. DARPA Information in a Photon program from the Army Research Office [W911NF-10-1-0416]
  2. National Science Foundation [ECCS-1128222]
  3. Air Force Office of Scientific Research [FA9550-14-1-0052]
  4. Claude E. Shannon Fellowship of the MIT Research Laboratory of Electronics
  5. NSF iQuISE Fellowship [0801525]
  6. IARPA [FA8650-11-C-7105]
  7. Chinese Scholarship Council [201161919021]

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We present an optimized fabrication process for superconducting nanowire single-photon detectors that allowed us to obtain a yield of similar to 70% for detectors based on 80-nm-wide niobium nitride nanowires. We fabricated detectors that showed 24-ps timing jitter and saturated detection efficiency without the need for cryogenic amplifiers, allowing for operation in a low-bias low-dark-count-rate regime while operating at maximum detection efficiency.

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