4.5 Article

Enhancing the photon-extraction efficiency of site-controlled quantum dots by deterministically fabricated microlenses

Journal

OPTICS COMMUNICATIONS
Volume 413, Issue -, Pages 162-166

Publisher

ELSEVIER SCIENCE BV
DOI: 10.1016/j.optcom.2017.12.032

Keywords

Site-controlled quantum dot; Single-photon source; In-situ electron-beam lithography; Microlens

Categories

Funding

  1. European Research Council under the European Union [615613]
  2. Volkswagen Foundation via NeuroQNet [91-053]
  3. German Research Foundation [CRC 787 (INST 131/670-2)]

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We report on the realization of scalable single-photon sources (SPSs) based on single site-controlled quantum dots (SCQDs) and deterministically fabricated microlenses. The fabrication process comprises the buried-stressor growth technique complemented with low-temperature in-situ electron-beam lithography for the integration of SCQDs into microlens structures with high yield and high alignment accuracy. The microlens-approach leads to a broadband enhancement of the photon-extraction efficiency of up to (21 +/- 2)% and a high suppression of multi-photon events with g((2))(tau = 0) < 0.06 without background subtraction. The demonstrated combination of site-controlled growth of QDs and in-situ electron-beam lithography is relevant for arrays of efficient SPSs which, can be applied in photonic quantum circuits and advanced quantum computation schemes. (C) 2017 Elsevier B.V. All rights reserved.

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