Focusing error detection based on astigmatic method with a double cylindrical lens group

Published 2018 View Full Article

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Title
Focusing error detection based on astigmatic method with a double cylindrical lens group
Authors
Keywords
-
Journal
OPTICS AND LASER TECHNOLOGY
Volume 106, Issue -, Pages 145-151
Publisher
Elsevier BV
Online
2018-04-13
DOI
10.1016/j.optlastec.2018.04.005

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