Fabrication of parabolic cylindrical microlens array by shaped femtosecond laser

A simple and efficient technique for fabricating parabolic cylindrical microlens arrays (CMLAs) on the surface of fused silica by shaped femtosecond (fs) laser direct-writing is demonstrated. By means of spatially shaping of a Gaussian fs laser beam to a Bessel distribution, an inversed cylindrical shape laser intensity profile is formed in a specific cross-sectional plane among the shaped optical field. Applying it to experiments, large area close-packed parabolic CMLAs with line-width of 37.5 gm and array size of about 5 x 5 mm are produced. The cross-sectional outline of obtained lenslets has a satisfied parabolic profile and the numerical aperture (NA) of lenslets is more than 0.35. Furthermore, the focusing performance of the fabricated CMLA is also tested in this work and it has been demonstrated that the focusing power of the CMLA with a parabolic profile is better than that with a semi-circular one. (C) 2018 Elsevier B.V. All rights reserved.