Optical lithography of three-dimensional magnetophotonic microdevices
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Title
Optical lithography of three-dimensional magnetophotonic microdevices
Authors
Keywords
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Journal
OPTICAL ENGINEERING
Volume 57, Issue 04, Pages 1
Publisher
SPIE-Intl Soc Optical Eng
Online
2018-03-02
DOI
10.1117/1.oe.57.4.041406
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