Journal
ACS APPLIED MATERIALS & INTERFACES
Volume 7, Issue 19, Pages 10152-10161Publisher
AMER CHEMICAL SOC
DOI: 10.1021/acsami.5b00110
Keywords
heterogeneous nanomaterial array; mixture gas sensor; local synthesis; semiconductor nanomaterial; one-dimensional nanomaterial
Funding
- Ministry of Education, Science and Technology as Global Frontier Project [CISS-2012-M3A6A6054201]
- Nano Material Technology Development Program through the National Research Foundation of Korea (NRF) - Ministry of Education, Science, ICT & Future Planning [2013043661]
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A novel method for the selective and localized synthesis of nanomatetials and their in Situ integration based on = serial combination of localized liquid-phase reaction has been developed for the fabrication of heterogeneous nanomaterial array. This method prOvides simple, fast and cost-effective fabrication process by using well-controlled thermal energy and therefore solves the Challenging problems of assembly and integration of heterogeneous nanomaterial array in functional microelectronic devices. We have fabricated a parallel array Of TiO2 nanotubes, CuO nanospikes, and ZnO nanowites, which exhibited adequate gas sensing response. Furthermore, we could approximately determine individual gas concentrations in a mixture gas consisting of 0-2 ppm of NO2 and 0-800 ppm of CO gas species by analyzing multiple data from an array Of heterogeneous sensing nanomaterials.
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