Journal
NANOTECHNOLOGY
Volume 29, Issue 33, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/1361-6528/aac73c
Keywords
electron-beam-induced deposition; AFM; localized infrared spectrum; chemical mapping; metallic probe tip
Funding
- Nebraska Research Initiative
- National Science Foundation (NSF) through the Nebraska Materials Research Science and Engineering Center (MRSEC) [DMR-1420645]
- National Key R&D Program of China [2016YFB0400801]
- Natural Science Foundation of China [61404147]
- Key Technology Research and Development Program of Jiangsu Province [BE2014147-1]
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We report on the fabrication of metallic, ultra-sharp atomic force microscope tips for localized nanoscale infrared (IR) spectrum measurements by using focused electron-beam-induced deposition of platinum or tungsten. The tip length can be controlled by changing the duration time of the electron beam. Probes of 12.0 +/- 5.0 nm radius-of-curvature can be routinely produced with high repeatability and near-100% yield. The near-field-enhancement appears stronger at the extremity of the metallic tip, compared with commercial pristine silicon-nitride probe tip. Finally, the performance of the modified metallic tips is demonstrated by imaging PVDF and PMMA thin films, which shows that spatial resolution is greatly enhanced. In addition, the signal intensity of the localized nanoscale IR spectrum is increased offering greater sensitivity for chemical IR imaging.
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