Co and CoTi x for contact plug and barrier layer in integrated circuits

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Title
Co and CoTi x for contact plug and barrier layer in integrated circuits
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 189, Issue -, Pages 78-84
Publisher
Elsevier BV
Online
2017-12-29
DOI
10.1016/j.mee.2017.12.017

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