Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium

Published 2018 View Full Article

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Title
Towards sub-micrometer high aspect ratio X-ray gratings by atomic layer deposition of iridium
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 192, Issue -, Pages 19-24
Publisher
Elsevier BV
Online
2018-02-06
DOI
10.1016/j.mee.2018.01.027

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