Beyond 100 nm resolution in 3D laser lithography — Post processing solutions

Published 2018 View Full Article

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Title
Beyond 100 nm resolution in 3D laser lithography — Post processing solutions
Authors
Keywords
3D laser lithography, Laser polymerization, Pyrolysis, Plasma etching
Journal
MICROELECTRONIC ENGINEERING
Volume 191, Issue -, Pages 25-31
Publisher
Elsevier BV
Online
2018-02-02
DOI
10.1016/j.mee.2018.01.018

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