Polydimethylsiloxane films engineered for smart nanostructures

Title
Polydimethylsiloxane films engineered for smart nanostructures
Authors
Keywords
-
Journal
MICROELECTRONIC ENGINEERING
Volume 194, Issue -, Pages 1-7
Publisher
Elsevier BV
Online
2018-02-28
DOI
10.1016/j.mee.2018.02.029

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