Journal
MICROELECTRONIC ENGINEERING
Volume 190, Issue -, Pages 73-78Publisher
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2018.01.008
Keywords
Nanoimprint; Stamp; Pattern transfer; Ultra-high resolution; OrmoStamp
Categories
Funding
- EU [654360]
- Swedish Foundation for Strategic Research (SSF), within project Development of Nanoimprint Infrastructure at Lund Nano Lab as a Key Enabler for Large -Scale Applications of Nanowires [RIF14-0090]
- NanoLund
- Myfab
- Swedish Foundation for Strategic Research (SSF) [RIF14-0090] Funding Source: Swedish Foundation for Strategic Research (SSF)
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Single-digit nanometer patterning by nanoimprint lithography is a challenging task, which requires optimum stamp fabrication technique. In the current work, we present different strategies for technology of hard master stamps to make intermediate working stamps with sub-10 nm features. Methods of both negative and positive master stamps fabrication, based on EBL, RIE and ALD are described and compared. A single-step copying of negative master stamps using a polymer material is a preferred strategy to reach the ultra high-resolution. Lines as small as 5.6 nm are demonstrated in a resist using a combined thermal and UV-imprint with OrmoStamp material as a working stamp. (C) 2018 Elsevier B.V. All rights reserved.
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