Development of a metrological atomic force microscope with a tip-tilting mechanism for 3D nanometrology

Published 2018 View Full Article

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Title
Development of a metrological atomic force microscope with a tip-tilting mechanism for 3D nanometrology
Authors
Keywords
-
Journal
MEASUREMENT SCIENCE and TECHNOLOGY
Volume 29, Issue 7, Pages 075005
Publisher
IOP Publishing
Online
2018-04-13
DOI
10.1088/1361-6501/aabe1a

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