A robust rotation-invariance displacement measurement method for a micro-/nano-positioning system

Published 2018 View Full Article

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Title
A robust rotation-invariance displacement measurement method for a micro-/nano-positioning system
Authors
Keywords
-
Journal
MEASUREMENT SCIENCE and TECHNOLOGY
Volume 29, Issue 5, Pages 055402
Publisher
IOP Publishing
Online
2018-01-05
DOI
10.1088/1361-6501/aaa560

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