Design and fabrication of crossed gratings with multiple zero-reference marks for planar encoders

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Title
Design and fabrication of crossed gratings with multiple zero-reference marks for planar encoders
Authors
Keywords
-
Journal
MEASUREMENT SCIENCE and TECHNOLOGY
Volume 29, Issue 2, Pages 025204
Publisher
IOP Publishing
Online
2017-11-27
DOI
10.1088/1361-6501/aa9d5e

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