Enhancement of electrical properties of flexible ITO/PET by atmospheric pressure roll-to-roll plasma

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Title
Enhancement of electrical properties of flexible ITO/PET by atmospheric pressure roll-to-roll plasma
Authors
Keywords
Roll-to-roll, Plasma treatment, Diffuse plasma, Work function, Flexible electronics, Surface cleaning
Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 75, Issue -, Pages 95-102
Publisher
Elsevier BV
Online
2017-11-23
DOI
10.1016/j.mssp.2017.11.022

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