Journal
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
Volume 75, Issue -, Pages 31-35Publisher
ELSEVIER SCI LTD
DOI: 10.1016/j.mssp.2017.11.018
Keywords
Ga2O3; Nanostructures; MOCVD; Catalytic growth
Categories
Funding
- National Natural Science Foundation of China [61774072, 61376046, 61674068]
- National Key Research and Development Program [2016YFB0401801]
- Science and Technology Developing Project of Jilin Province [20150519004JH, 20160101309JC, 20170204045GX]
- Program for New Century Excellent Talents in University [NCET-13-0254]
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One-dimensional beta-Ga2O3 nanostructures were grown at different temperatures on c-plane sapphire substrates by MOCVD using Au as catalyst. The structural, morphological and photoluminescence properties of beta-Ga2O3 nanostructures grown at different temperatures were characterized and compared in detail. As the growth temperature was increased, beta-Ga2O3 nanostructures exhibited improved crystalline quality and possessed a typical beta-Ga2O3 structure with high purity. The beta-Ga2O3 nanostructures grown at 750 degrees C showed intense ultraviolet-blue emission at room temperature. Different morphologies including islands-like, nanowires, nanorods, grain-like structures were obtained depending on the growth temperature. The correlation between the nanostructures shapes and the growth processes was also discussed.
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