Double sided grating fabrication for high energy X-ray phase contrast imaging

Published 2018 View Full Article

Authors

Keywords

XPCI, Silicon deep reactive ion etch, Front-to-back alignment, Gratings, Electrocoating, Conformal plating

Journal

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING

Volume -, Issue -, Pages -

Publisher

Elsevier BV

Online

2018-04-19

DOI

10.1016/j.mssp.2018.04.016

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