Microstructure, mechanical, and tribological properties of niobium vanadium carbon nitride films

Title
Microstructure, mechanical, and tribological properties of niobium vanadium carbon nitride films
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 36, Issue 3, Pages 031511
Publisher
American Vacuum Society
Online
2018-04-18
DOI
10.1116/1.5020954

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