Spatial atomic layer deposition for coating flexible porous Li-ion battery electrodes

Title
Spatial atomic layer deposition for coating flexible porous Li-ion battery electrodes
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 36, Issue 1, Pages 01A123
Publisher
American Vacuum Society
Online
2017-12-29
DOI
10.1116/1.5006670

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