Controlling the B/Ti ratio of TiBx thin films grown by high-power impulse magnetron sputtering

Published 2018 View Full Article

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Title
Controlling the B/Ti ratio of TiBx thin films grown by high-power impulse magnetron sputtering
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 36, Issue 3, Pages 030604
Publisher
American Vacuum Society
Online
2018-04-26
DOI
10.1116/1.5026445

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