Electron-enhanced atomic layer deposition of silicon thin films at room temperature

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Title
Electron-enhanced atomic layer deposition of silicon thin films at room temperature
Authors
Keywords
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Journal
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
Volume 36, Issue 1, Pages 01A118
Publisher
American Vacuum Society
Online
2017-12-27
DOI
10.1116/1.5006696

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