Manganese(II) Molecular Sources for Plasma-Assisted CVD of Mn Oxides and Fluorides: From Precursors to Growth Process

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Title
Manganese(II) Molecular Sources for Plasma-Assisted CVD of Mn Oxides and Fluorides: From Precursors to Growth Process
Authors
Keywords
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Journal
Journal of Physical Chemistry C
Volume 122, Issue 2, Pages 1367-1375
Publisher
American Chemical Society (ACS)
Online
2017-12-22
DOI
10.1021/acs.jpcc.7b10277

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