Modeling the impact of radiation-enhanced diffusion on implanted ion profiles

Title
Modeling the impact of radiation-enhanced diffusion on implanted ion profiles
Authors
Keywords
-
Journal
JOURNAL OF NUCLEAR MATERIALS
Volume 509, Issue -, Pages 168-180
Publisher
Elsevier BV
Online
2018-06-30
DOI
10.1016/j.jnucmat.2018.06.042

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