Effect of oxygen flow rate on microstructure properties of SiO 2 thin films prepared by ion beam sputtering

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Title
Effect of oxygen flow rate on microstructure properties of SiO 2 thin films prepared by ion beam sputtering
Authors
Keywords
-
Journal
JOURNAL OF NON-CRYSTALLINE SOLIDS
Volume 482, Issue -, Pages 203-207
Publisher
Elsevier BV
Online
2017-12-28
DOI
10.1016/j.jnoncrysol.2017.12.046

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