Electric Heating Performance of Pyrolyzed Photoresist Films Prepared by Proton Irradiation and Pyrolysis

In this study, pyrolyzed photoresist films (PPFs) were prepared using commercial SU8 photoresist by proton irradiation and pyrolysis. SU8 thin films were irradiated with high-energy proton ions and then pyrolyzed in a tube furnace at 1000 degrees C under inert atmosphere. The carbonization yield of the PPFs increased with an increasing fluence due to the formation of more crosslinked network structures at a higher fluence. The electrical resistance decreased with an increasing fluence due to the higher remaining thickness and carbonization yield at a higher fluence. Therefore, the PPFs prepared at 1x10(16) ions/cm(2) showed the maximum temperature of 150 degrees C at 20 V and a high electric power efficiency of 1.57 mW/degrees C.