Enhancing the light extraction of AlGaN-based ultraviolet light-emitting diodes in the nanoscale

AlGaN-based ultraviolet light-emitting diodes (UV LEDs) are promising next-generation UV sources for a wide variety of applications. The state-of-the-art AlGaN-based UV LEDs exhibit much lower output power and external quantum efficiency than highly commercialized GaN visible LEDs. One key issue for UV LEDs is the poor light-extraction efficiency. We have reviewed the recent progress in the light extraction approaches for AlGaN-based UV LEDs, including the highly reflective techniques, and the surface/interface modification for total internal reflection mitigating. Moreover, AlGaN-based UV LEDs in the nanoscale structures, such as nanopillar, nanorod, and nanowire structures, are also discussed. (C) 2018 Society of Photo Optical Instrumentation Engineers (SPIE)