High-performance low-frequency MEMS energy harvester via partially covering PZT thick film

Published 2018 View Full Article

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Title
High-performance low-frequency MEMS energy harvester via partially covering PZT thick film
Authors
Keywords
-
Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 28, Issue 9, Pages 095007
Publisher
IOP Publishing
Online
2018-05-17
DOI
10.1088/1361-6439/aac58a

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