Damage and repair of organic and inorganic surfaces by Ar + ion and gas cluster ion beam sputtering

Published 2018 View Full Article

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Title
Damage and repair of organic and inorganic surfaces by Ar + ion and gas cluster ion beam sputtering
Authors
Keywords
-
Journal
JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA
Volume -, Issue -, Pages -
Publisher
Elsevier BV
Online
2018-02-02
DOI
10.1016/j.elspec.2018.01.005

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