Effects of deposition temperature and ammonia flow on metal-organic chemical vapor deposition of hexagonal boron nitride

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Title
Effects of deposition temperature and ammonia flow on metal-organic chemical vapor deposition of hexagonal boron nitride
Authors
Keywords
A1. Adsorption, A2. Surface processes, A3. Chemical vapor deposition processes, A3. Metalorganic chemical vapor deposition, A3. Organometallic vapor phase epitaxy, B1. Nitrides
Journal
JOURNAL OF CRYSTAL GROWTH
Volume 485, Issue -, Pages 90-95
Publisher
Elsevier BV
Online
2017-12-09
DOI
10.1016/j.jcrysgro.2017.12.011

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