Thin film metrology and microwave loss characterization of indium and aluminum/indium superconducting planar resonators

Title
Thin film metrology and microwave loss characterization of indium and aluminum/indium superconducting planar resonators
Authors
Keywords
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Journal
JOURNAL OF APPLIED PHYSICS
Volume 123, Issue 20, Pages 205304
Publisher
AIP Publishing
Online
2018-05-24
DOI
10.1063/1.5020514

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