Concurrent wafer-level measurement of longitudinal and transverse effective piezoelectric coefficients (d33,f and e31,f) by double beam laser interferometry

Comparison of effective transverse piezoelectric coefficientse31,fof Pb(Zr,Ti)O3thin films between direct and converse piezoelectric effects

(2015) Yuichi Tsujiura et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Electrode size dependence of piezoelectric response of lead zirconate titanate thin films measured by double beam laser interferometry

(2013) S. Sivaramakrishnan et al.   APPLIED PHYSICS LETTERS

Precise measurement of the transverse piezoelectric coefficient for thin films on anisotropic substrate

(2013) Doo-Man Chun et al.   JOURNAL OF APPLIED PHYSICS

The significance of the piezoelectric coefficient d31,eff determined from cantilever structures

(2012) M Dekkers et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Wafer mapping of the transverse piezoelectric coefficient, e31,f, using the wafer flexure technique with sputter deposited Pt strain gauges

(2011) Rudeger H.T. Wilke et al.   SENSORS AND ACTUATORS A-PHYSICAL

What is the Young's Modulus of Silicon?

(2010) Matthew A. Hopcroft et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

Effective Piezoelectric Coefficients of Ferroelectric Thin Films on Elastic Substrates

(2008) Nicolas Zalachas et al.   JOURNAL OF INTELLIGENT MATERIAL SYSTEMS AND STRUCTURES