Post-deposition annealing of thin RF magnetron sputter-deposited VO 2 films above the melting point

Published 2018 View Full Article

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Title
Post-deposition annealing of thin RF magnetron sputter-deposited VO 2 films above the melting point
Authors
Keywords
-
Journal
JOURNAL OF ALLOYS AND COMPOUNDS
Volume 763, Issue -, Pages 558-569
Publisher
Elsevier BV
Online
2018-06-03
DOI
10.1016/j.jallcom.2018.06.014

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