Platinum-catalyzed hydrolysis etching of SiC in water: A density functional theory study

Published 2018 View Full Article

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Title
Platinum-catalyzed hydrolysis etching of SiC in water: A density functional theory study
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 57, Issue 5, Pages 055703
Publisher
Japan Society of Applied Physics
Online
2018-04-17
DOI
10.7567/jjap.57.055703

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