AlN metal–semiconductor field-effect transistors using Si-ion implantation

Title
AlN metal–semiconductor field-effect transistors using Si-ion implantation
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 57, Issue 4S, Pages 04FR11
Publisher
Japan Society of Applied Physics
Online
2018-03-06
DOI
10.7567/jjap.57.04fr11

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