Piezoelectric MEMS: Ferroelectric thin films for MEMS applications

Published 2018 View Full Article

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Title
Piezoelectric MEMS: Ferroelectric thin films for MEMS applications
Authors
Keywords
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Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 57, Issue 4, Pages 040101
Publisher
Japan Society of Applied Physics
Online
2018-03-09
DOI
10.7567/jjap.57.040101

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