Fracture toughness of Ti-Si-N thin films

Published 2018 View Full Article

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Title
Fracture toughness of Ti-Si-N thin films
Authors
Keywords
TiSiN, Fracture toughness, Micromechanical testing, Single cantilever bending, Damage tolerance
Journal
INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS
Volume 72, Issue -, Pages 78-82
Publisher
Elsevier BV
Online
2017-12-16
DOI
10.1016/j.ijrmhm.2017.12.015

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