4.6 Article

Low-Temperature Co-Fired Unipoled Multilayer Piezoelectric Transformers

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TUFFC.2017.2785356

Keywords

Co-firing; low temperature; multilayer; piezoelectric transformer (PTs); power density

Funding

  1. DARPA MATRIX Program
  2. China Scholarship Council

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The reliability of piezoelectric transformers (PTs) is dependent upon the quality of fabrication technique as any heterogeneity, prestress, or misalignment can lead to spurious response. In this paper, unipoled multilayer PTs were investigated focusing on high-power composition and co-firing profile in order to provide low-temperature synthesized high-quality device measured in terms of efficiency and power density. The addition of 0.2 wt% CuO into Pb0.98Sr0.02(Mg1/3Nb2/3)(0.06)(Mn1/3Nb2/3)(0.06)(Zr-0.48 Ti-0.52)(0.88)O-3 (PMMnN-PZT) reduces the co-firing temperature from 1240 degrees C to 930 degrees C, which allows the use of Ag/Pd inner electrode instead of noble Pt inner electrode. Low-temperature synthesized material was found to exhibit excellent piezoelectric properties (Q(m) = 1300, k(p) = 0.47, tan delta = 0.4%, d(33) = 218 pC/N, and T-c = 325 degrees C). The performance of the PT co-fired with Ag/Pd electrode at 930 degrees C was similar to that co-fired at 1240 degrees C with Pt electrode (25% reduction in sintering temperature). Both high-and low-temperature synthesized PTs demonstrated 5-W output power with >90% efficiency and 11.5 W/cm(3) power density.

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