A Data Driven Cycle Time Prediction With Feature Selection in a Semiconductor Wafer Fabrication System

Published 2018 View Full Article

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Title
A Data Driven Cycle Time Prediction With Feature Selection in a Semiconductor Wafer Fabrication System
Authors
Keywords
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Journal
IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING
Volume 31, Issue 1, Pages 173-182
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2018-01-02
DOI
10.1109/tsm.2017.2788501

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