Improvement of Sidewall Roughness of Submicron SOI Waveguides by Hydrogen Plasma and Annealing

Published 2018 View Full Article

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Title
Improvement of Sidewall Roughness of Submicron SOI Waveguides by Hydrogen Plasma and Annealing
Authors
Keywords
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Journal
IEEE PHOTONICS TECHNOLOGY LETTERS
Volume 30, Issue 7, Pages 591-594
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2018-01-11
DOI
10.1109/lpt.2018.2791631

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