Ion Implantation in Silicon for Trimming the Operating Wavelength of Ring Resonators

Published 2018 View Full Article

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Title
Ion Implantation in Silicon for Trimming the Operating Wavelength of Ring Resonators
Authors
Keywords
-
Journal
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
Volume 24, Issue 4, Pages 1-7
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2018-02-01
DOI
10.1109/jstqe.2018.2799660

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